Publication | Closed Access
Morphological and structural study of plasma deposited fluorocarbon films at different thicknesses
80
Citations
11
References
2003
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsDifferent ThicknessesStructural StudyThin FilmsGas Discharge PlasmaPlasma ProcessingThin Film ProcessingFluorocarbon Films
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