Concepedia

Publication | Closed Access

Sub-50 nm period patterns with EUV interference lithography

DOI

194

Citations

7

References

2003

Year

H. H. Solak, C. David, J. Gobrecht, V. Golovkina, F. Cerrina, S. O. Kim, Paul F. Nealey
Microelectronic Engineering

References

YearCitations

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