Concepedia

Electrochemical–mechanical planarization of copper: Effects of chemical additives on voltage controlled removal of surface layers in electrolytes

P.C. Goonetilleke, D. Roy

Materials Chemistry and Physics · 2005 · 39 citations · 43 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceElectrochemical EngineeringElectrochemistrySurface ScienceElectrochemical CellsElectrode MaterialsElectrode PotentialsElectrode-electrolyte InterfacesElectrolyte MaterialsElectrolyte SolutionsAdditivesChemical AdditivesElectrochemical ReactionsElectrochemical Surface EngineeringElectrochemical Surface ModificationElectrochemical-mechanical CouplingSurface Layers

References

43

Electrocatalytic reduction of nitrate at low concentration on coinage and transition-metal electrodes in acid solutions

George-Daniel Dima, A.C.A. de Vooys, Marc T. M. Koper · Journal of Electroanalytical Chemistry · 2003 · 724 citations

Natural Sciences, Chemical Engineering, Chemistry +17

Chemical mechanical planarization for microelectronics applications

Parshuram B. Zantye, Ashok Kumar, A. K. Sikder · Materials Science and Engineering R Reports · 2004 · 612 citations

Engineering, Materials Engineering, Materials Science +14

The investigation of the passive behaviour of copper in weakly acid and alkaline solutions and the examination of the passive film by esca and ISS

Hans‐Henning Strehblow, B. Titze · Electrochimica Acta · 1980 · 334 citations

Natural Sciences, Materials Engineering, Materials Science +14

Tables of standard electrode potentials

Al Steyermark · Microchemical Journal · 1981 · 309 citations

Natural Sciences, Chemistry, Electroanalytical Methods +11

Tables of Standard Electrode Potentials

A.T.K. · Journal of Molecular Structure · 1979 · 241 citations

Natural Sciences, Chemistry, Electroanalytical Methods +11