Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2007 · 19 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsThin FilmsEpitaxial GrowthRadiation Damage In MaterialsSemiconductor Thin FilmsThin-film DepositionEpitaxial Film GrowthEpitaxial Thin FilmsEpitaxial Thin-film GrowthIon Beam IrradiationIon Irradiation DamagePulsed Laser DepositionThin-film Growth Mechanisms
12