Concepedia
Thin Solid Films · 1984 · 32 citations · 9 references
9
Very high rate reactive sputtering of TiN, ZrN and HfN
William D. Sproul · Thin Solid Films · 1983 · 155 citations
Natural Sciences, Materials Engineering, Materials Science +11
TiN and TiC coating on cemented carbides by ion plating
Mitsunori Kobayashi, Yoshihiko Doi · Thin Solid Films · 1978 · 100 citations
Natural Sciences, Materials Engineering, Materials Science +14
Residual compressive stress in sputter-deposited TiC films on steel substrates
A. V. Pan, J. E. Greene · Thin Solid Films · 1981 · 88 citations
Natural Sciences, Materials Engineering, Materials Science +16
Adhesion and hardness of ion-plated TiC and TiN coatings
E. Hümmer, A.J. Perry · Thin Solid Films · 1983 · 67 citations
Structure and Electrical Properties of Sputtered Films of Hafnium and Hafnium Compounds
F. T. Smith · Journal of Applied Physics · 1970 · 37 citations
Natural Sciences, Materials Engineering, Materials Science +17