Publication | Closed Access
Substrate bias voltage influenced structural, electrical and optical properties of dc magnetron sputtered Ta2O5 films
15
Citations
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References
2008
Year
Materials EngineeringMaterials ScienceElectrical EngineeringOptical MaterialsEngineeringEpitaxial GrowthTa2o5 FilmsOxide ElectronicsApplied PhysicsDc MagnetronSubstrate Bias VoltageMagnetic Thin FilmsThin FilmsMicroelectronicsThin Film Processing
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