Concepedia

Publication | Closed Access

Tungsten interconnects in the nano-scale regime

DOI

58

Citations

3

References

2005

Year

W. Steinhögl, G. Steinlesberger, Mathieu Perrin, G. Scheinbacher, G. Schindler, M. Traving, M. Engelhardt
Microelectronic Engineering

References

YearCitations

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