Properties of thick DLC films prepared by plasma-based ion implantation and deposition using combined RF and H.V. pulses - Concepedia

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Properties of thick DLC films prepared by plasma-based ion implantation and deposition using combined RF and H.V. pulses

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Citations

8

References

2003

Year

Y. Oka, Ming Tao, Yoshimi Nishimura, Kingo Azuma, Etsuo Fujiwara, Mitsuyasu Yatsuzuka

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Materials ScienceIon ImplantationEngineeringApplied PhysicsThick Dlc FilmsPulse PowerThin FilmsPulsed Laser DepositionPlasma ApplicationPlasma ProcessingPlasma-based Ion Implantation

References

	Year	Citations

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