Fourier-transform speckle profilometry: three-dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces

Abstract

An interferometric technique for automated profilometry of diffuse objects has been proposed. It is based on the Fourier-fringe analysis of spatiotemporal specklegrams produced by a wavelength-shift interferometer with a laser diode as a frequency-tunable light source. Unlike conventional moiré techniques the proposed technique permits the objects to have discontinuous height steps and/or surfaces spatially isolated from one another. Experimental results are presented that demonstrate the validity of the principle.