Applied Physics A · 1986 · 16 citations · 7 references
Natural SciencesMaterials EngineeringMaterials ScienceOpticsPhysical ChemistrySurface ScienceChemical Vapor DepositionLaser Material ProcessingLaser OpticsLaser PhysicsLaser Surface ProcessingChemical Vapor Deposition CoatingsChemical Vapor Deposition MaterialsChemical Vapor Deposition NucleationChemical Vapor Deposition PrecursorsLaser Patterning
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Lateral growth rates in laser CVD of microstructures
Frank Petzoldt, K. Piglmayer, W. Kr�uter et al. · Applied Physics A · 1984 · 42 citations