Effects of surface roughness of substrates on the c-axis preferred orientation of ZnO films deposited by r.f. magnetron sputtering

Preferred orientation and piezoelectricity in sputtered ZnO films

Z. M. Rittersma, G.J. Burger · Journal of Applied Physics · 1998 · 203 citations

Natural Sciences, Materials Engineering, Materials Science +15

Dielectric Thin Films through rf Sputtering

P. D. Davidse, L. I. Maissel · Journal of Applied Physics · 1966 · 168 citations

Natural Sciences, Materials Science, Physics +16

Preparation of ZnO thin films for high-resolution field emission display by electron beam evaporation

Yoichiro Nakanishi, Aki Miyake, Hiroko Kominami et al. · Applied Surface Science · 1999 · 162 citations

Natural Sciences, Materials Engineering, Materials Science +16

The effect of O2 on reactively sputtered zinc oxide

C. R. Aita, A. J. Purdes, K. L. Lad et al. · Journal of Applied Physics · 1980 · 94 citations

Natural Sciences, Materials Science, Physics +16

Microstructural evolution and preferred orientation change of radio-frequency-magnetron sputtered ZnO thin films

Yong Eui Lee, Jaebin Lee, Young Jin Kim et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 90 citations

Natural Sciences, Materials Engineering, Materials Science +16