Publication | Closed Access
Controlled carbonization of Si(001) surface using hydrocarbon radicals in ultrahigh vacuum
14
Citations
10
References
1994
Year
Chemical EngineeringEngineeringUltrahigh VacuumNanotechnologySurface AnalysisSurface ScienceApplied PhysicsHydrocarbon RadicalsSemiconductor Device FabricationVacuum DeviceSilicon On Insulator
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