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Surface-impedance measurements of superconducting NbN films
69
Citations
20
References
1991
Year
Surface CharacterizationSuperconducting MaterialElectrical EngineeringEngineeringSpecific ResistancePhysicsNanoelectronicsSurface ScienceApplied PhysicsSuperconductivityCondensed Matter PhysicsNbn FilmsPenetration DepthStripline ResonatorThin FilmsElectronic PackagingMicroelectronicsNbn Thin Films
The temperature and frequency dependences of the surface impedance of NbN thin films have been measured from 4.2 to 13 K and from 0.5 to 10 GHz using a stripline resonator. At 4.2 K resonant-cavity measurements of surface resistance were made at 35 and 56 GHz. From surface-reactance measurements using both cavity and stripline techniques, we obtain the penetration depth extrapolated to 0 K, \ensuremath{\lambda}(0)=3700 \AA{}. For the stripline, the film thickness was approximately 8000 \AA{}, which is about two times the measured penetration depth. The weak-coupling (full) Mattis-Bardeen theory was used to fit the temperature dependence of the surface resistance. Based on the quality of the weak-coupling fit to the data, we conclude that the strong-coupling effect is not important in the local and dirty limits. We discuss the correction due to the finite film thickness of the stripline measurements of the surface resistance.
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