Publication | Closed Access
Evolution of surface topography of fused silica by ion beam sputtering
94
Citations
26
References
2001
Year
Materials ScienceIon ImplantationEngineeringPhysicsMicrofabricationTarget FabricationSurface ScienceApplied PhysicsSurface AnalysisIon Beam SputteringIon BeamSurface Topography
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