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Growth of ZnO nanowire arrays directly onto Si via substrate topographical adjustments using both wet chemical and dry etching methods

Materials ScienceWet ChemicalEngineeringMicrofabricationNanotechnologyOxide ElectronicsApplied PhysicsSemiconductor Device FabricationDry Etching MethodsSilicon On InsulatorMicroelectronicsZno NanowireNanolithography Method