Publication | Closed Access
Elemental composition and structural properties of thin rf sputtered Ta2O5 layers
11
Citations
5
References
1995
Year
Materials ScienceMaterial AnalysisEngineeringElemental CompositionMaterial PropertyOxide ElectronicsSurface ScienceApplied PhysicsTa2o5 LayersThin FilmsLayered MaterialThin Rf
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