Publication | Closed Access
Preparation of SiNx film by pulsed laser ablation in nitrogen gas ambient
10
Citations
12
References
2002
Year
Materials ScienceChemical EngineeringAdvanced Laser ProcessingEngineeringSinx FilmLaser ApplicationsLaser AblationLaser Processing TechnologyNitrogen Gas AmbientLaser-assisted DepositionPulsed Laser DepositionHigh-power Lasers
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