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A new formulation of fringing capacitance and its application to the control of parallel-plate electrostatic micro actuators

Electrical EngineeringNew FormulationEngineeringSoft RoboticsFlexible ElectronicsMicrofabricationMechanicsMechanical EngineeringMechatronicsMechanical SystemsActuationMicroactuatorMicro-electromechanical System