Publication | Closed Access
Evolution of surface roughness in silicon X-ray mirrors exposed to a low-energy ion beam
19
Citations
10
References
2010
Year
Ion ImplantationEngineeringPhysicsMicrofabricationSurface RoughnessSurface ScienceApplied PhysicsX-ray DiffractionSilicon X-ray MirrorsIon BeamSynchrotron RadiationLow-energy Ion BeamX-ray Optic
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