Tunable dielectric properties of lead barium zirconate niobate films

Abstract

The effect of substitution of niobium for zirconium on tunable behavior of lead barium zirconate (PBZ) films was investigated. Lead barium zirconate niobate films were grown on Pt∕Ti∕SiO2∕Si substrates using chemical solution deposition method. The substitution of Nb for Zr enhances tunable properties of PBZ films. The dielectric tunabilities are excellent, all higher than 45% with a maximum=60%. The substitution of Nb for Zr raises values of figure of merit (FOM) of films. The maximum FOM takes place at 5mol% Nb with a value of 90, which is about three times that of the corresponding PBZ film.