Publication | Closed Access
Composite HfO2/Al2O3-dielectric AlGaAs/InGaAs MOS-HEMTs by using RF sputtering/ozone water oxidation
14
Citations
14
References
2014
Year
Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringRf SemiconductorOxide ElectronicsMicrowave CeramicGallium OxideMicroelectronicsElectrical Insulation
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