Restraint of tool path ripple based on surface error distribution and process parameters in deterministic finishing

Abstract

The influence from the regular tool path to micro fabrication errors in deterministic finishing is studied through the simulations and experiments. The random pitch tool path based on the surface error distribution and the process parameters is designed to reduce this residual error when adopting the regular path to achieve the corrective polish. A nucleated glass flat mirror is polished with this method on the experimental installation UPF700-7 developed by ourselves. The surface accuracy is improved from the initial λ/30(RMS, 90%aperture, λ = 632.8 nm) to the final λ/200 in 5 minutes and the medium-high spatial frequency errors induced by the regular path is restricted well at the same time. The accuracy of the simulation and the validity of the random pitch tool path are both proved through the experiments.