ZnO–SnO2 transparent conductive films deposited by opposed target sputtering system of ZnO and SnO2 targets - Concepedia

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ZnO–SnO2 transparent conductive films deposited by opposed target sputtering system of ZnO and SnO2 targets

67

Citations

7

References

2004

Year

Yukako Hayashi, Kumiko Kondo, Kei‐ichiro Murai, Toshihiro Moriga, Ichiro Nakabayashi, H. Fukumoto, Kikuo Tominaga

Materials ScienceEngineeringNanotechnologyOxide ElectronicsOpposed TargetApplied PhysicsThin Film Process TechnologySno2 TargetsThin FilmsThin Film Processing

References

	Year	Citations

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