A self-excited micro cantilever biosensor actuated by PZT using the mass micro balancing technique - Concepedia

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A self-excited micro cantilever biosensor actuated by PZT using the mass micro balancing technique

56

Citations

10

References

2006

Year

Yeolho Lee, Geunbae Lim, Wonkyu Moon

Sensors and Actuators A Physical

Biomedical SensorsEngineeringMicrofabricationMicroactuatorBiomedical EngineeringMicro-electromechanical System

References

	Year	Citations

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