Publication | Closed Access

The interaction between vapor-deposited Al atoms and methylester-terminated self-assembled monolayers studied by time-of-flight secondary ion mass spectrometry, X-ray photoelectron spectroscopy and infrared reflectance spectroscopy

Materials ScienceAluminium NitrideInfrared Reflectance SpectroscopyEngineeringSelf-assemblySurface ScienceApplied PhysicsMethylester-terminated Self-assembled MonolayersVapor-deposited Al AtomsChemistryChemical DepositionLayered MaterialChemical Vapor Deposition