Excimer Laser Surface Processing of Ceramics: Process and Properties

Abstract

Surface modification of ceramics has proved to be of benefit in a number of applications. Excimer laser light provides a rapid and efficient means for surface alloying and modification of ceramic materials. The laser pulse can melt the surface of the ceramic as well as a deposited metal layer. This results in diffusional mixing in the liquid state, which is followed by rapid resolidification. The high temperatures involved can overcome kinetic barriers to mixing found in ion beam experiments. Tribological measurements on surface treated materials show reduced friction and increased surface toughness. Increased fracture toughness in laser surface alloyed ceramics has also been observed. Excimer laser processes therefore may enable the use of ceramic materials in applications for which they are not now suitable.