TEM observation of grown-in defects in CZ and epitaxial silicon wafers detected with optical shallow defect analyzer - Concepedia

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TEM observation of grown-in defects in CZ and epitaxial silicon wafers detected with optical shallow defect analyzer

11

Citations

2

References

2000

Year

K. Minowa, Kazuo Takeda, Satoshi Tomimatsu, K. Umemura

Journal of Crystal Growth

Epitaxial Silicon WafersElectrical EngineeringEngineeringTem ObservationApplied PhysicsGrown-in DefectsDefect FormationSemiconductor Device FabricationSilicon On InsulatorDefect ToleranceOptoelectronicsSilicon DebuggingMicroelectronics

References

	Year	Citations

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