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An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/ oxygen plasmas

Materials ScienceX-ray SpectroscopyEngineeringPhotochemistryElectron SpectroscopyNatural SciencesSpectroscopyX-ray DiffractionPhysical ChemistryChemistryHydrogenPlasma ApplicationHexamethyldisiloxane/ Oxygen Plasmas