Pulsed-Laser Induced Desorption in GaAs: A Dynamic Pulse Mass Counting Study

Abstract

Desorption of neutral atoms and molecules of pulsed laser irradiation of GaAs has been studied by means of a pulse mass counting technique. The translational temperature of desorbing molecules, As 2 is found to be three times higher than that of As atoms. Remarkable angular dependence of translational temperature is also observed. These facts suggest that the translational temperature does not necessarily indicate the surface temperature when particles are desorbed.