Structural, mechanical and tribological properties of plasma-assisted chemically vapour deposited hydrogenated CxN1−x:H films - Concepedia

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Structural, mechanical and tribological properties of plasma-assisted chemically vapour deposited hydrogenated CxN1−x:H films

38

Citations

20

References

1994

Year

E.H.A. Dekempeneer, J. Meneve, J. Smeets, S. Kuypers, L. Eersels, R. N. Jacobs

Surface and Coatings Technology

Materials ScienceChemical EngineeringEngineeringTribological PropertiesHydrogenThin FilmsChemical Vapor DepositionH FilmsPlasma ProcessingHydrogenated Cxn1−x

References

	Year	Citations

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