Publication | Closed Access
An investigation into parallel and cross grinding of aspheric surface on monocrystal silicon
32
Citations
12
References
2015
Year
Materials ScienceMaterials EngineeringCross GrindingEngineeringMicrofabricationMonocrystal SiliconSurface ScienceApplied PhysicsMechanical EngineeringAspheric SurfaceSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsMicrostructure
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