Monte Carlo Simulations on Scattering of Bombarded Ions in Solids

Abstract

By taking account of not only an elastic scattering but also an inelastic scattering, the Monte Carlo technique based on a single scattering model is applied to a simulation of the behavior of ion beam in the amorphous target. The calculations are carried out for the light ion beam mainly and the results show a fairly good agreement with the experiments on the range and the backscattering. Also ion trajectories are depicted on the chart by the plotter connected with the digital computer to get a direct view of the scattering processes in solids.