“Zeptofarad” (10−21 F) resolution capacitance sensor for scanning capacitance microscopy

Abstract

We describe a sensor for use in a scanning capacitance microscope (SCM) that is capable of “zeptofarad” (10−21 F) capacitance measurement resolution in a 1 Hz bandwidth with a peak-to-peak sense voltage on the probe tip of no more than 300 mV. This sensitivity is based on experimental data and simulation results that are in excellent agreement. The complete sensor incorporates an oscillator (phase locked to a 10 MHz crystal oscillator), a coupled transmission line resonator, an amplifier, and a peak detector. The resonator is fabricated from copper-clad, low-loss dielectric material and its size is such that it is easily incorporated with a scanning probe microscope. The sensor’s use in the SCM enables capacitance resolution that has not previously been possible while retaining the instrumental advantages of imaging at low sense voltages. The performance of this sensor is discussed and compared to alternative scanning capacitance microscopy methodologies.