Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses

Abstract

We report on the fabrication of hollow microfluidic channels with a circular cross-sectional shape embedded in fused silica by spatiotemporally focusing the femtosecond laser beam. We demonstrate both theoretically and experimentally that the spatiotemporal focusing of femtosecond laser beam allows for the creation of a three-dimensionally symmetric spherical intensity distribution at the focal spot.