Capacitive humidity sensors based on a newly designed interdigitated electrode structure

Nanoscaled interdigitated electrode arrays for biochemical sensors

P. Van Gerwen, Wim Laureyn, Wim Laureys et al. · Sensors and Actuators B Chemical · 1998 · 390 citations

Nanosensors, Biomedical Sensors, Engineering +8

A high-speed capacitive humidity sensor with on-chip thermal reset

U Kang, K.D. Wise · IEEE Transactions on Electron Devices · 2000 · 227 citations

Engineering, Measurement, Education +17

A capacitive humidity sensor integrated with micro heater and ring oscillator circuit fabricated by CMOS–MEMS technique

Ching‐Liang Dai · Sensors and Actuators B Chemical · 2006 · 151 citations

Micro Heater, Biomedical Sensors, Cmos–mems Technique +8

A novel capacitive-type humidity sensor using CMOS fabrication technology

Lei Gu, Qing‐An Huang, Ming Qin · Sensors and Actuators B Chemical · 2004 · 149 citations

Electrical Engineering, Engineering, Sensor Design +3

Interdigitated humidity sensors for a portable clinical microsystem

C Laville, Claude Pellet · IEEE Transactions on Biomedical Engineering · 2002 · 57 citations

Chemical Engineering, Engineering, Implantable Sensor +11