Low temperature silicon direct bonding for application in micromechanics: bonding energies for different combinations of oxides

Bonding of silicon wafers for silicon-on-insulator

W. Maszara, Georges Goetz, A.L. Caviglia et al. · Journal of Applied Physics · 1988 · 861 citations

Engineering, Materials Engineering, Materials Science +17

Silicon-to-silicon direct bonding method

Masaru Shimbo, K. Furukawa, K. Fukuda et al. · Journal of Applied Physics · 1986 · 507 citations

Engineering, Materials Engineering, Materials Science +17

A Model for the Silicon Wafer Bonding Process

R. Stengl, T. Y. Tan, U. Gösele · Japanese Journal of Applied Physics · 1989 · 277 citations

Natural Sciences, Materials Engineering, Materials Science +16

Silicon fusion bonding for fabrication of sensors, actuators and microstructures

Philip W. Barth · Sensors and Actuators A Physical · 1990 · 174 citations

Engineering, Materials Engineering, Materials Science +12

Chemical Free Room Temperature Wafer To Wafer Direct Bonding

Shari Farrens, James Dekker, Jason Kenneth Smith et al. · Journal of The Electrochemical Society · 1995 · 146 citations

Engineering, Materials Engineering, Materials Science +14