Micro-electro-mechanically tunable metamaterial with enhanced electro-optic performance

Abstract

We experimentally demonstrate a micro-electro-mechanically tunable metamaterial with enhanced electro-optical performance by increasing the number of movable cantilevers in the symmetrical split ring resonator metamaterial unit cell. Simulations were carried out to understand the interaction of the incident terahertz radiation with out-of-plane deforming metamaterial resonator. In order to improve the overall device performance, the number of released cantilever in a unit cell was increased from one to two, and it was seen that the tunable range was doubled and the switching contrast improved by a factor of around five at 0.7 THz. This simple design approach can be adopted for a wide range of high performance electro-optical devices such as continuously tunable filters, modulators, and electro-optic switches to enable future photonic circuit applications.