Publication | Closed Access
New algorithm of white-light phase shifting interferometry pursing higher repeatability by using numerical phase error correction schemes of pre-processor, main processor, and post-processor
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Citations
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References
2007
Year
Adaptive OpticPhotonicsEngineeringMeasurementCalibrationOptical PropertiesWhite-light PhaseOptical TestingInterferometryEducationOptical Information ProcessingOptical MeasurementInstrumentationOptical SystemsMain ProcessorNew Algorithm
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