Concepedia

Publication | Closed Access

Synthesis of silicon nitride films by ion beam enhanced deposition

DOI

14

Citations

7

References

1989

Year

Xianghuai Liu, Bin Xue, Zhihong Zheng, Zuyao Zhou, Zou Shichang
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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