Publication | Closed Access
Influence of the V/III ratio in the gas phase on thin epitaxial AlN layers grown on (0001) sapphire by high temperature hydride vapor phase epitaxy
27
Citations
41
References
2014
Year
Materials ScienceMaterials EngineeringAluminium NitrideEngineeringPhysicsGas PhaseSurface ScienceApplied PhysicsCondensed Matter PhysicsAluminum Gallium NitrideV/iii RatioMolecular Beam EpitaxyEpitaxial Growth
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