Concepedia

Publication | Closed Access

SU-8: promising resist for advanced direct LIGA applications for high aspect ratio mechanical microparts

DOI

14

Citations

1

References

2006

Year

Josef Kouba, Rainer Engelke, Martin Bednarzik, Gisela Ahrens, H.‐U. Scheunemann, G. Gruetzner, Bernd Loechel, Harris Miller, Diana Haase
Microsystem Technologies

References

YearCitations

Page 1