Concepedia
Progress in Surface Science · 2000 · 218 citations · 165 references
165
A Monte Carlo computer program for the transport of energetic ions in amorphous targets
J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations
Engineering, Materials Science, Physics +16
Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
Peter Sigmund · Physical Review · 1969 · 3.5K citations
Natural Sciences, Physics, Atomic Physics +13
Handbook of Thin Film Technology
L. I. Maissel, R. Glang, Paul P. Budenstein · Journal of The Electrochemical Society · 1971 · 2.8K citations
Natural Sciences, Materials Engineering, Materials Science +12
Soviet Physics—Solid State
Nature · 1959 · 1.8K citations · Full text
Fundamentals of surface and thin film analysis
L. C. Feldman, James W. Mayer, F. Adams · Analytica Chimica Acta · 1989 · 911 citations