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Micromachined, planar-geometry, atmospheric-pressure, battery-operated microplasma devices (MPDs) on chips for analysis of microsamples of liquids, solids, or gases by optical-emission spectrometry

EngineeringAnalytical InstrumentationMicrofabricationMedicineBattery-operated Microplasma DevicesAnalytical MicrosystemsMass SpectrometryOptical-emission SpectrometryAnalytical ChemistryMicroscale SystemInstrumentationMicro-optical ComponentMicrofluidicsBiophysics