Publication | Closed Access
Effect of substrate temperature on the physical properties of copper nitride films by r.f. reactive sputtering
69
Citations
17
References
2001
Year
Materials EngineeringMaterials ScienceAluminium NitrideEngineeringSurface ScienceApplied PhysicsSubstrate TemperatureReactive SputteringChemical DepositionChemical Vapor DepositionThin Film ProcessingPhysical Properties
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