Nanoscale Patterning and Electronics on Flexible Substrate by Direct Nanoimprinting of Metallic Nanoparticles

Abstract

Nanoscale patterning and electronics fabrication on flexible polymer substrates via direct nanoimprinting of metal nanoparticles was demonstrated. The metal nanoparticle solution enables a simple one-step metal nanoimprinting with very low pressure and temperature. Electrical and structural characterizations on flexible substrate during cyclic bending deformations verify the robustness of the nanoimprinted structures to mechanical deformation conditions.