Concepedia

Publication | Closed Access

Si micro-turbine by proton beam writing and porous silicon micromachining

DOI

36

Citations

16

References

2009

Year

I. Rajta, S.Z. Szilasi, Péter Fürjes, Z. Fekete, Csaba Dücső
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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