Structure Control of GaN Films Grown on (001) GaAs Substrates by GaAs Surface Pretreatments

Abstract

Two types of cubic and hexagonal GaN films were deposited on (001) GaAs substrates. The film structure proved to be controlled by GaAs pretreatments. By performing a N 2 H 4 (hydrazine) pretreatment of GaAs substrates, the GaN films, which were otherwise hexagonal similarly to ordinary films on sapphire substrates, became cubic. A surface cubic nitride layer was found to be formed on the pretreated GaAs by a RHEED (reflection high-energy electron diffraction) observation, which is thought to be the substantial substrate for the following growth of a cubic GaN film.