Sensors and Actuators B Chemical · 2004 · 115 citations · 17 references
Natural SciencesMaterials EngineeringMaterials ScienceSensorsSurface ScienceThin FilmsAtmospheric Oxidation ProcessesChemical Vapor DepositionGas SensorsSurface OxidationSurface PhysicsThin Film OxidationOzoneOzone MeasurementReactive SputteringSputteringSputtering EffectsThin-film OxidesThin-film Sensor Materials
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A New Detector for Gaseous Components Using Semiconductive Thin Films.
Tetsuro Seiyama, Akio Kato, Kiyoshi Fujiishi et al. · Analytical Chemistry · 1962 · 1.5K citations