Applied Surface Science · 1996 · 16 citations · 7 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface ChemistrySurface EngineeringSurface ScienceChemical Vapor DepositionNanostructured SurfacesSemiconductor SurfacesSurface ModificationSurface PhysicsThin-film DepositionChemical Vapor Deposition AdhesionChemical Vapor Deposition CoatingsChemical Vapor Deposition MaterialsDeposition On Nanostructured SubstratesSiliconSilicon Chemical Vapor DepositionSilicon Surface Science
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