Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 11 citations · 18 references
Natural SciencesMaterials EngineeringMaterials ScienceAcousticsPropagationThin FilmsAcoustic MaterialsAcoustic Wave PropagationPhysical AcousticsThin Film Mechanical PropertiesTransducer TechnologyWave PropagationAcoustic Characterization Of MaterialsElastic ConstantsMagnetron SputteringPiezoelectric Thin FilmsReactive SputteringTransducersWave Propagation AnalysisWave Propagation In Solids
Nitrogenated diamond-like carbon (a-C:N) thin films on Si(100) were deposited by radio frequency magnetron reactive sputtering. Using ZnO piezoelectric thin films, the surface acoustic wave (SAW) propagation properties of a-C:N thin films on Si(100) have been experimentally investigated using bidirectional interdigital transducers between ZnO and a-C:N/Si(100). A generalized SAW mode with velocities between 5000 and 7000 m/s were observed. A high velocity pseudo-SAW mode was also observed and identified with simulated data, of which the velocity was 13 850 m/s. We calculated the film elastic constants from the phase velocities in the layered structure. The calculated constants for a-C:N thin films on Si were c11=392.1 and c44=185.7 GPa.
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